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RPS MKS ASTEX ASTRON2L FI20620-1 -
RPS MKS ASTEX ASTRON2L FI20620-1 -
ASTEX AX7610PSK-Q Chemical Downstream Plasma Source -
MKS ASTEX RPS FI20160-3 660-011161-702 Microwave Smartpower -
MKS ASTEX RPS ASTRON e/ex AX7685-85 0190-40602 -
MKS ENI B-10513 SPECTRUM 10513-00 P/N 0190-36638 RF GENERATOR -
COMDEL CV2000 P/N 0190-31017W 60MHz RF GENERATOR -
MKS ASTEX ASTRON i AX7670-16 P/N 0190-24886 RPSC Remote Source Plasma -
ENI ACG-6B RF Generator ACG-6B-06 13.56MHz 600W -
AE Apex 10KW/13 Advanced Energy 13.56MHz RF Generator -
AE Apex 3013 Advanced Energy RF Generator 3156113-012 -
AE Apex 5513 Advanced Energy 5.5KW RF Generator 3156115-003 13.56MHz -
Advanced Energy AE Apex 1513 RF Generator 1.5kW 13.56MHz PN 660-032596R013 -
Advanced Energy AE PDX II 2000 Plasma Drive PN 660-078400-002 MN 3150310-100A -
Advanced Energy AE PDX 5000 F47 MF GEN PN 27278209-00 3156043-207 LOW FREQUENCY GENERATOR -
Advanced Energy MDX-L12M DC POWER SUPPLY -
ADTEC AMVG-2000-RT Automatic Impedance Matching Unit 2kW 13.56MHz -
DAIHEN WGA-30A 2MHZ 3KW RF POWER GENERATOR -
DAIHEN MFG-20SA3A RF CONTROLLER 2000W 380KHz -
DAIHEN MFG-20SA3 MFG-20SA3A RF GENERATOR 380KHz/2KW
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